OPAL-MD platform
The station’s hardware consists of a motorized 4-axis motion system chuck positioning stage, with thermal control as an option. It also comprises a high-resolution top vision system and a telecentric side vision system. The station can accommodate up to three probing heads for optical or electrical probes.
The high resolution and repeatability of the base motion system and motorized optical probe translates into lower insertion loss and error margin on optical measurements that can repeat on multiple dies and circuits efficiently, without any human intervention during test execution.